Patent Assignment
Reel/Frame 053963/0036
Assignment of Assignor's Interest
Recorded: 2020-10-02
Pages: 3
Assignee
TOKYO ELECTRON LIMITED
AKASAKA BIZ TOWER, 3-1 AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
3D Semiconductor Apparatus Manufactured with a Plurality of Substrates and Method of Manufacture Thereof