Patent Assignment
Reel/Frame 054068/0048
Assignment of Assignor's Interest
Recorded: 2020-10-15
Pages: 3
Assignee
CARL ZEISS SMT GMBH
RUDOLF-EBER-STRASSE 2, OBERKOCHEN, 73447, GERMANY
Covered Property
(1)
Compensation Optical System for an Interferometric Measuring System