Patent Assignment
Reel/Frame 054254/0468
Assignment of Assignor's Interest
Recorded: 2020-11-03
Pages: 6
Assignors
FUJIWARA, TAKAYUKI
Executed: 2020-10-22
OIKAWA, KENICHI
Executed: 2020-10-22
KOBAYASHI, TOMOHIRO
Executed: 2020-10-22
FUKUSHIMA, MASAHIRO
Executed: 2020-10-22
Assignee
SHIN-ETSU CHEMICAL CO., LTD.
6-1, OHTEMACHI 2-CHOME, CHIYODA-KU, TOKYO, JAPAN
Covered Property
(1)
Onium Salt Compound, Chemically Amplified Resist Composition and Patterning Process