Patent Assignment
Reel/Frame 054328/0224
Assignment of Assignor's Interest
Recorded: 2020-11-10
Pages: 5
Assignors
SUEN, SHICH-CHANG
Executed: 2013-12-31
WU, LI-CHIEH
Executed: 2013-12-31
LIU, CHI-JEN
Executed: 2013-12-31
PENG, HE HUI
Executed: 2014-01-02
CHEN, LIANG-GUANG
Executed: 2013-12-31
CHEN, YUNG-CHUNG
Executed: 2013-12-31
Assignee
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
NO. 8, LI-HSIN RD. 6, SCIENCE-BASED INDUSTRIAL PARK, HSIN-CHU, 300-77, TAIWAN
Covered Property
(1)
Method for Metal Gate Surface Clean