Patent Assignment
Reel/Frame 054358/0803
Assignment of Assignor's Interest
Recorded: 2020-11-13
Pages: 5
Assignors
RAISANEN, PETRI
Executed: 2018-12-11
OLSTAD, MARK
Executed: 2018-12-11
ROMERO, JOSE ALEXANDRO
Executed: 2018-12-11
LI, DONG
Executed: 2018-12-13
JOHNSON, WARD
Executed: 2018-12-11
CHEN, JERRY
Executed: 2018-11-10
Assignee
ASM IP HOLDING B.V.
VERSTERKERSTRAAT 8, ALMERE, 1322 AP, NETHERLANDS
Covered Property
(1)
Method for Depositing a Material Film on a Substrate Within a Reaction Chamber by a Cyclical Deposition Process and Related Device Structures