Patent Assignment
Reel/Frame 054363/0590
Assignment of Assignor's Interest
Recorded: 2020-11-13
Pages: 5
Assignors
LIN, XING
Executed: 2018-05-25
GAO, PEIPEI
Executed: 2018-06-01
WANG, FEI
Executed: 2018-05-25
TOLLE, JOHN
Executed: 2018-06-04
JOTHEESWARAN, BUBESH BABU
Executed: 2018-06-04
RAMANATHAN, VISH
Executed: 2018-05-25
HILL, ERIC
Executed: 2018-05-31
Assignee
ASM IP HOLDING B.V.
VERSTERKERSTRAAT 8, ALMERE, 1322 AP, NETHERLANDS
Covered Property
(1)
Apparatus and Method for Removal of Oxide and Carbon from Semiconductor Films in a Single Processing Chamber
Application:
16/000,109 →
Publication:
US 2019/0019670