Patent Assignment
Reel/Frame 054467/0320
Assignment of Assignor's Interest
Recorded: 2020-11-25
Pages: 11
Assignors
INOUE, TAISEI
Executed: 2020-11-17
SAKURAI, HIROKI
Executed: 2020-11-17
NAKAZAWA, TAKASHI
Executed: 2020-11-17
Assignee
TOKYO ELECTRON LIMITED
3-1, AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Substrate Processing Apparatus and Substrate Processing Method