Patent Assignment
Reel/Frame 054502/0153
Assignment of Assignor's Interest
Recorded: 2020-12-01
Pages: 5
Assignors
KATO, KOREHITO
Executed: 2020-10-12
TAKAHASHI, YOSHINAO
Executed: 2020-10-09
SHIMODA, MITSUHARU
Executed: 2020-10-12
IKETANI, YOSHIHIKO
Executed: 2020-10-12
Assignee
KANTO DENKA KOGYO CO., LTD.
3-2, MARUNOUCHI 2-CHOME, CHIYODA-KU, TOKYO, 100-0005, JAPAN
Covered Property
(1)
Plasma Etching Method Using Gas Molecule Containing Sulfur Atom