Patent Assignment
Reel/Frame 054503/0897
Assignment of Assignor's Interest
Recorded: 2020-12-01
Pages: 5
Assignee
TOKYO OHKA KOGYO CO., LTD.
150, NAKAMARUKO, NAKAHARA-KU, KANAGAWA, KAWASAKI-SHI, 211-0012, JAPAN
Covered Property
(1)
Ruthenium-Etching Solution, Method for Manufacturing Ruthenium-Etching Solution, Method for Processing Object to Be Processed, and Method for Manufacturing Ruthenium-Containing Wiring