Patent Assignment
Reel/Frame 054577/0930
Assignment of Assignor's Interest
Recorded: 2020-12-08
Pages: 8
Assignors
YAMAUCHI, TAKASHI
Executed: 2020-11-25
SHIBATA, DAIKI
Executed: 2020-11-30
KAWAKAMI, KOHEI
Executed: 2020-12-02
Assignee
TOKYO ELECTRON LIMITED
3-1 AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Liquid Treatment Apparatus and Method of Adjusting Temperature of Treatment Liquid