Patent Assignment
Reel/Frame 054585/0122
Assignment of Assignor's Interest
Recorded: 2020-12-03
Pages: 37
Assignors
DEGAI, MOTOMU
Executed: 2020-11-17
NAKATANI, KIMIHIKO
Executed: 2020-11-18
NAKAGAWA, TAKASHI
Executed: 2020-12-02
WASEDA, TAKAYUKI
Executed: 2020-11-17
HASHIMOTO, YOSHITOMO
Executed: 2020-11-17
Assignee
KOKUSAI ELECTRIC CORPORATION
3-4, KANDAKAJI-CHO, CHIYODA-KU, TOKYO, 101-0045, JAPAN
Covered Property
(1)
Method of Manufacturing Semiconductor Device, Substrate Processing Apparatus, and Recording Medium