Patent Assignment
Reel/Frame 054619/0210
Assignment of Assignor's Interest
Recorded: 2020-12-11
Pages: 3
Assignors
CHEN, YEN-HAO
Executed: 2020-11-27
LAI, WEI-HAN
Executed: 2020-11-27
CHANG, CHING-YU
Executed: 2020-11-27
Assignee
TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
NO.8, LI-HSIN RD. 6, SCIENCE BASED INDUSTRIAL PARK, HSINCHU, 300, TAIWAN
Covered Property
(1)
Photoresist Composition and Method of Manufacturing a Semiconductor Device