Patent Assignment
Reel/Frame 054641/0379
Assignment of Assignor's Interest
Recorded: 2020-12-14
Pages: 3
Assignors
ZI, AN-REN
Executed: 2016-11-01
CHENG, JOY
Executed: 2016-11-01
CHANG, CHING-YU
Executed: 2016-11-01
Assignee
TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
NO. 8, LI-HSIN RD. 6, SCIENCE-BASED INDUSTRIAL PARK, HSIN-CHU, 300-77, TAIWAN
Covered Property
(1)
Metal-Compound-Removing Solvent and Method in Lithography