Patent Assignment
Reel/Frame 054757/0470
Assignment of Assignor's Interest
Recorded: 2020-12-28
Pages: 7
Assignors
HATANPÄÄ, TIMO
Executed: 2020-11-09
VÄYRYNEN, KATJA
Executed: 2020-11-09
RITALA, MIKKO
Executed: 2020-11-11
LESKELÄ, MARKKU
Executed: 2020-11-13
Assignee
ASM IP HOLDING B.V.
VERSTERKERSTRAAT 8, ALMERE, 1322 AP, NETHERLANDS
Covered Property
(1)
Cyclic Deposition Methods for Forming Metal-Containing Material and Films and Structures Including the Metal-Containing Material