Patent Assignment
Reel/Frame 054772/0596
Assignment of Assignor's Interest
Recorded: 2020-12-30
Pages: 5
Assignors
LEE, RU-LIANG
Executed: 2020-11-26
CHENG, YU-HUNG
Executed: 2020-11-26
TU, YEUR-LUEN
Executed: 2020-12-29
Assignee
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LIMITED
NO. 8, LI-HSIN 6 ROAD, HSINCHU SCIENCE PARK, HSINCHU, ROC 30077, TAIWAN
Covered Property
(1)
Epitaxial Semiconductor Liner for Enhancing Uniformity of a Charged Layer in a Deep Trench and Methods of Forming the Same