Patent Assignment
Reel/Frame 054776/0311
Assignment of Assignor's Interest
Recorded: 2020-12-30
Pages: 6
Assignors
TANEMURA, KAZUKI
Executed: 2020-12-02
SAMBONSUGE, SHOTA
Executed: 2020-12-04
OKUNO, NAOKI
Executed: 2020-11-27
Assignee
SEMICONDUCTOR ENERGY LABORATORY CO., LTD.
398, HASE, ATSUGI-SHI, KANAGAWA-KEN, 243-0036, JAPAN
Covered Property
(1)
Method for Manufacturing Metal Oxynitride Film