Patent Assignment
Reel/Frame 054825/0272
Assignment of Assignor's Interest
Recorded: 2021-01-06
Pages: 10
Assignors
SAKURAI, HIROKI
Executed: 2020-12-10
GOTO, DAISUKE
Executed: 2020-12-18
NAKAZAWA, TAKASHI
Executed: 2020-12-18
TAKAMATSU, YUSUKE
Executed: 2020-12-10
HASHIMOTO, YUSUKE
Executed: 2020-12-10
Assignee
TOKYO ELECTRON LIMITED
3-1 AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Substrate Processing Apparatus