Patent Assignment
Reel/Frame 054897/0766
Assignment of Assignor's Interest
Recorded: 2021-01-12
Pages: 3
Assignors
YANG, LI-PO
Executed: 2020-08-28
LAI, WEI-HAN
Executed: 2020-08-28
CHANG, CHING-YU
Executed: 2020-08-28
Assignee
TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
NO.8, LI-HSIN RD. 6, SCIENCE BASED INDUSTRIAL PARK, HSINCHU, 300, TAIWAN
Covered Property
(1)
Photoresist Composition and Method of Forming Photoresist Pattern