Patent Assignment
Reel/Frame 054900/0504
Assignment of Assignor's Interest
Recorded: 2021-01-13
Pages: 3
Assignors
VAN DER SCHAAR, MAURITS
Executed: 2016-09-22
BOZKURT, MURAT
Executed: 2016-09-22
WARNAAR, PATRICK
Executed: 2016-09-26
VAN DER SANDEN, STEFAN CORNELIS THEODORUS
Executed: 2016-09-27
Assignee
ASML NETHERLANDS B.V.
P.O. BOX 324, VELDHOVEN, 5500 AH, NETHERLANDS
Covered Property
(1)
Method and Apparatus for Design of a Metrology Target