Patent Assignment
Reel/Frame 054909/0756
Assignment of Assignor's Interest
Recorded: 2021-01-13
Pages: 3
Assignee
TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
NO. 8, LI-HSIN RD. 6, SCIENCE BASED INDUSTRIAL PARK, HSINCHU, 300, TAIWAN
Covered Property
(1)
Photoresist Composition and Method of Forming Photoresist Pattern