Patent Assignment
Reel/Frame 054930/0950
Assignment of Assignor's Interest
Recorded: 2021-01-15
Pages: 2
Assignor
KOSHIMIZU, CHISHIO
Executed: 2020-11-20
Assignee
TOKYO ELECTRON LIMITED
3-1 AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Plasma Processing System and Substrate Processing Method