Patent Assignment
Reel/Frame 054950/0135
Assignment of Assignor's Interest
Recorded: 2021-01-19
Pages: 7
Assignor
YOSHIMURA, TAKUTO
Executed: 2021-01-18
Assignee
TOKYO ELECTRON LIMITED
3-1, AKASAKA 5-CHOME, MINATO-KU,, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Processing Method and Plasma Processing Apparatus