Patent Assignment
Reel/Frame 055047/0124
Assignment of Assignor's Interest
Recorded: 2021-01-27
Pages: 6
Assignors
SOHN, MANUEL
Executed: 2021-01-26
BREMENSDORFER, ROLF
Executed: 2020-08-31
HAMM, SILKE
Executed: 2020-09-15
HEZLER, DIETER
Executed: 2020-08-30
Assignee
MATTSON THERMAL PRODUCTS GMBH
DAIMLERSTRASSE 10, DORNSTADT, 89160, GERMANY
Covered Property
(1)
Rapid Thermal Processing System with Cooling System
Application:
63/066,856 →
Related Assignments
(2)
Other recorded transfers of the patent in this record — the chain of ownership.
Assignment of Assignor's Interest
Feb 23, 2021
From: MATTSON THERMAL PRODUCTS, GMBH
To: MATTSON TECHNOLOGY, INC.
Reel/Frame 055368/0987 →
Assignment of Assignor's Interest
Feb 23, 2021
From: MATTSON TECHNOLOGY, INC.
To: MATTSON TECHNOLOGY, INC.; BEIJING E-TOWN SEMICONDUCTOR TECHNOLOGY CO., LTD
Reel/Frame 055370/0755 →