Patent Assignment
Reel/Frame 055047/0246
Assignment of Assignor's Interest
Recorded: 2021-01-27
Pages: 3
Assignor
YANG, MICHAEL X.
Executed: 2021-01-07
Assignee
MATTSON TECHNOLOGIES, INC.
47131 BAYSIDE PARKWAY, FREMONT, CALIFORNIA, 94538
Covered Property
(1)
Workpiece Processing Apparatus with Vacuum Anneal Reflector Control
Application:
63/129,108 →
Related Assignments
(3)
Other recorded transfers of the patent in this record — the chain of ownership.
Assignment of Assignor's Interest
Jan 27, 2021
From: SOHN, MANUEL; BREMENSDORFER, ROLF
To: MATTSON THERMAL PRODUCTS GMBH
Reel/Frame 055047/0187 →
Assignment of Assignor's Interest
Feb 23, 2021
From: MATTSON THERMAL PRODUCTS, GMBH
To: MATTSON TECHNOLOGY, INC.
Reel/Frame 055368/0987 →
Assignment of Assignor's Interest
Feb 23, 2021
From: MATTSON TECHNOLOGY, INC.
To: MATTSON TECHNOLOGY, INC.; BEIJING E-TOWN SEMICONDUCTOR TECHNOLOGY CO., LTD
Reel/Frame 055370/0755 →