Patent Assignment
Reel/Frame 055108/0494
Assignment of Assignor's Interest
Recorded: 2021-02-02
Pages: 3
Assignors
YANG, CHANSYUN DAVID
Executed: 2020-10-30
YANG, CHAN-LON
Executed: 2020-10-30
CHANG, KEH-JENG
Executed: 2020-10-30
YUH, PERNG-FEI
Executed: 2020-10-30
Assignee
TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
NO. 8, LI-HSIN RD., 6, HSINCHU SCIENCE PARK, HSINCHU, 300-77, TAIWAN
Covered Property
(1)
Radical-Activated Etching of Metal Oxides
Patent:
11,276,604 →
Application:
17/081,709 →