Assignment of Assignor's Interest

Recorded: 2021-02-04 Pages: 8

Assignors

HAN, YUN

Executed: 2021-02-03

VENTZEK, PETER

Executed: 2021-02-03

RANJAN, ALOK

Executed: 2021-02-03

Assignee

TOKYO ELECTRON LIMITED

AKASAKA BIZ TOWER, 3-1 AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN

Covered Property (1)

Methods for Anisotropic Etch of Silicon-based Materials with Selectivity to Organic Materials

Patent: 11,342,195 →

Application: 17/167,199 →