Patent Assignment
Reel/Frame 055152/0190
Assignment of Assignor's Interest
Recorded: 2021-02-04
Pages: 3
Assignor
YANG, MICHAEL X.
Executed: 2020-08-18
Assignee
MATTSON TECHNOLOGIES, INC.
47131 BAYSIDE PARKWAY, FREMONT, CALIFORNIA, 94538
Covered Property
(1)
Transmission-Based Temperature Measurement of a Workpiece in a Thermal Processing System
Application:
62/983,064 →
Related Assignments
(3)
Other recorded transfers of the patent in this record — the chain of ownership.
Assignment of Assignor's Interest
Feb 4, 2021
From: STOREK, MICHAEL; BREMENSDORFER, ROLF; LIEBERER, MARKUS
To: MATTSON THERMAL PRODUCTS GMBH
Reel/Frame 055152/0220 →
Assignment of Assignor's Interest
Feb 23, 2021
From: MATTSON THERMAL PRODUCTS, GMBH
To: MATTSON TECHNOLOGY, INC.
Reel/Frame 055368/0987 →
Assignment of Assignor's Interest
Feb 23, 2021
From: MATTSON TECHNOLOGY, INC.
To: MATTSON TECHNOLOGY, INC.; BEIJING E-TOWN SEMICONDUCTOR TECHNOLOGY CO., LTD
Reel/Frame 055370/0755 →