Patent Assignment
Reel/Frame 055163/0280
Assignment of Assignor's Interest
Recorded: 2021-02-05
Pages: 10
Assignors
SATO, TOMOAKI
Executed: 2021-01-20
KIKKAWA, YUKI
Executed: 2021-01-22
SHIMODA, TAKAFUMI
Executed: 2021-01-20
NEGISHI, TAKAYUKI
Executed: 2021-01-20
Assignee
TOKUYAMA CORPORATION
1-1, MIKAGE-CHO, SHUNAN-SHI, YAMAGUCHI, 745-8648, JAPAN
Covered Property
(1)
INHIBITOR FOR RuO4 GAS GENERATION AND METHOD FOR INHIBITING RuO4 GAS GENERATION