Patent Assignment
Reel/Frame 055166/0288
Assignment of Assignor's Interest
Recorded: 2021-02-05
Pages: 5
Assignee
MATTSON THERMAL PRODUCTS GMBH
DAIMLERSTRASSE 10, DORNSTADT, 89160, GERMANY
Covered Property
(1)
Systems And Methods For Transportation Of Replaceable Parts In a Vacuum Processing Apparatus
Application:
15/930,943 →
Publication:
US 2020/0365381
Related Assignments
(3)
Other recorded transfers of the patent in this record — the chain of ownership.
Assignment of Assignor's Interest
Feb 5, 2021
From: ZUCKER, MARTIN L.; PAKULSKI, RYAN M.; MA, SHAWMING; YANG, MICHAEL X.
To: MATTSON TECHNOLOGIES, INC.
Reel/Frame 055166/0268 →
Assignment of Assignor's Interest
Feb 23, 2021
From: MATTSON THERMAL PRODUCTS, GMBH
To: MATTSON TECHNOLOGY, INC.
Reel/Frame 055368/0987 →
Assignment of Assignor's Interest
Feb 23, 2021
From: MATTSON TECHNOLOGY, INC.
To: MATTSON TECHNOLOGY, INC.; BEIJING E-TOWN SEMICONDUCTOR TECHNOLOGY CO., LTD
Reel/Frame 055370/0755 →