Patent Assignment
Reel/Frame 055234/0659
Assignment of Assignor's Interest
Recorded: 2021-02-11
Pages: 8
Assignors
HIGUCHI, RINTARO
Executed: 2021-01-20
OGATA, TSUNEMOTO
Executed: 2021-01-20
NAKAMORI, MITSUNORI
Executed: 2021-01-20
Assignee
TOKYO ELECTRON LIMITED
3-1, AKASAKA 5-CHOME, MINATO-KU, TOKYO, 1076325, JAPAN
Covered Property
(1)
Substrate Processing Method and Substrate Processing Apparatus