Assignment of Assignor's Interest

Recorded: 2021-02-22 Pages: 4

Assignors

RAHTU, ANTTI

Executed: 2007-01-23

TOIS, EVA

Executed: 2007-02-15

ELERS, KAI-ERIK

Executed: 2007-02-15

LI, WEI-MIN

Executed: 2007-01-29

Assignee

ASM INTERNATIONAL

JAN VAN EYCKLAAN 10, BILTHOVEN, NETHERLANDS

Covered Properties (4)

Enhanced Thin Film Deposition

Patent: 9,127,351 →

Application: 13/766,469 →

Publication: US 2013/0183445

Enhanced Thin Film Deposition

Patent: 9,831,094 →

Application: 14/812,139 →

Publication: US 2016/0118262

Enhanced Thin Film Deposition

Patent: 10,297,444 →

Application: 15/824,143 →

Publication: US 2018/0130666

Enhanced Thin Film Deposition

Patent: 10,964,534 →

Application: 16/411,957 →

Publication: US 2019/0267231