Patent Assignment
Reel/Frame 055386/0067
Assignment of Assignor's Interest
Recorded: 2021-02-24
Pages: 8
Assignors
ASHIHARA, HIROSHI
Executed: 2021-01-04
DEGAI, MOTOMU
Executed: 2021-01-04
WASEDA, TAKAYUKI
Executed: 2021-01-12
Assignee
KOKUSAI ELECTRIC CORPORATION
3-4, KANDAKAJI-CHO, CHIYODA-KU, TOKYO, 1010045, JAPAN
Covered Property
(1)
Method of Manufacturing Semiconductor Device, Substrate Processing Apparatus and Non-transitory Computer-readable Recording Medium