Patent Assignment
Reel/Frame 055386/0913
Assignment of Assignor's Interest
Recorded: 2021-02-24
Pages: 14
Assignors
HIROCHI, YUKITOMO
Executed: 2021-01-29
NOGAMI, TAKASHI
Executed: 2021-02-03
YAMAGISHI, NORICHIKA
Executed: 2021-01-19
YANAGISAWA, YOSHIHIKO
Executed: 2021-01-19
Assignee
KOKUSAI ELECTRIC CORPORATION
3-4, KANDAKAJI-CHO, CHIYODA-KU, TOKYO, 1010045, JAPAN
Covered Property
(1)
Substrate Processing Apparatus, Method of Manufacturing Semiconductor Device and Non-transitory Computer-readable Recording Medium