Patent Assignment
Reel/Frame 055432/0188
Assignment of Assignor's Interest
Recorded: 2021-02-26
Pages: 3
Assignor
TOYOMAKI, TOSHIAKI
Executed: 2021-02-18
Assignee
TOKYO ELECTRON LIMITED
3-1 AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Positioning Apparatus, Processing System, and Positioning Method