Patent Assignment
Reel/Frame 055460/0185
Assignment of Assignor's Interest
Recorded: 2021-03-02
Pages: 5
Assignors
BANGALORE UMESH, SUHAS
Executed: 2021-02-19
RAO, PREETHAM
Executed: 2021-02-19
PETHE, SHIRISH A.
Executed: 2021-02-24
ZHANG, FUHONG
Executed: 2021-02-24
KALATHIPARAMBIL, KISHOR KUMAR
Executed: 2021-02-26
RIKER, MARTIN LEE
Executed: 2021-02-19
ZHONG, LANLAN
Executed: 2021-02-19
Assignee
APPLIED MATERIALS, INC.
3050 BOWERS AVENUE, SANTA CLARA, CALIFORNIA, 95054
Covered Property
(1)
Substrate Temperature Non-Uniformity Reduction Over Target Life Using Spacing Compensation