Patent Assignment
Reel/Frame 055483/0679
Assignment of Assignor's Interest
Recorded: 2021-03-03
Pages: 4
Assignor
TAKEDA, TSUYOSHI
Executed: 2021-02-16
Assignee
KOKUSAI ELECTRIC CORPORATION
3-4, KANDAKAJI-CHO, CHIYODA-KU, TOKYO, 101-0045, JAPAN
Covered Property
(1)
Substrate Processing Apparatus, Method of Manufacturing Semiconductor Device, and Plasma Generator