Patent Assignment
Reel/Frame 055545/0334
Assignment of Assignor's Interest
Recorded: 2021-03-10
Pages: 3
Assignor
YANG, MICHAEL X.
Executed: 2020-08-18
Assignee
MATTSON TECHNOLOGY, INC.
47131 BAYSIDE PARKWAY, FREMONT, CALIFORNIA, 94538
Covered Property
(1)
Transmission-Based Temperature Measurement of a Workpiece in a Thermal Processing System
Related Assignments
(3)
Other recorded transfers of the patent in this record — the chain of ownership.
Assignment of Assignor's Interest
Mar 10, 2021
From: STOREK, MICHAEL; BREMENSDORFER, ROLF; LIEBERER, MARKUS
To: MATTSON THERMAL PRODUCTS GMBH
Reel/Frame 055545/0713 →
Assignment of Assignor's Interest
Mar 10, 2021
From: MATTSON THERMAL PRODUCTS, GMBH
To: MATTSON TECHNOLOGY, INC.
Reel/Frame 055546/0145 →
Assignment of Assignor's Interest
Mar 10, 2021
From: MATTSON TECHNOLOGY, INC.
To: MATTSON TECHNOLOGY, INC.; BEIJING E-TOWN SEMICONDUCTOR TECHNOLOGY CO., LTD
Reel/Frame 055546/0437 →