Patent Assignment
Reel/Frame 055546/0145
Assignment of Assignor's Interest
Recorded: 2021-03-10
Pages: 4
Assignor
MATTSON THERMAL PRODUCTS, GMBH
Executed: 2021-02-19
Assignee
MATTSON TECHNOLOGY, INC.
47131 BAYSIDE PARKWAY, FREMONT, CALIFORNIA, 94538
Covered Property
(1)
Transmission-Based Temperature Measurement of a Workpiece in a Thermal Processing System
Related Assignments
(3)
Other recorded transfers of the patent in this record — the chain of ownership.
Assignment of Assignor's Interest
Mar 10, 2021
From: YANG, MICHAEL X.
To: MATTSON TECHNOLOGY, INC.
Reel/Frame 055545/0334 →
Assignment of Assignor's Interest
Mar 10, 2021
From: STOREK, MICHAEL; BREMENSDORFER, ROLF; LIEBERER, MARKUS
To: MATTSON THERMAL PRODUCTS GMBH
Reel/Frame 055545/0713 →
Assignment of Assignor's Interest
Mar 10, 2021
From: MATTSON TECHNOLOGY, INC.
To: MATTSON TECHNOLOGY, INC.; BEIJING E-TOWN SEMICONDUCTOR TECHNOLOGY CO., LTD
Reel/Frame 055546/0437 →