Patent Assignment
Reel/Frame 055545/0713
Assignment of Assignor's Interest
Recorded: 2021-03-10
Pages: 5
Assignors
STOREK, MICHAEL
Executed: 2020-08-20
BREMENSDORFER, ROLF
Executed: 2020-09-21
LIEBERER, MARKUS
Executed: 2021-01-28
Assignee
MATTSON THERMAL PRODUCTS GMBH
DAIMLERSTRASSE 10, DORNSTADT, 89160, GERMANY
Covered Property
(1)
Transmission-Based Temperature Measurement of a Workpiece in a Thermal Processing System
Related Assignments
(3)
Other recorded transfers of the patent in this record — the chain of ownership.
Assignment of Assignor's Interest
Mar 10, 2021
From: YANG, MICHAEL X.
To: MATTSON TECHNOLOGY, INC.
Reel/Frame 055545/0334 →
Assignment of Assignor's Interest
Mar 10, 2021
From: MATTSON THERMAL PRODUCTS, GMBH
To: MATTSON TECHNOLOGY, INC.
Reel/Frame 055546/0145 →
Assignment of Assignor's Interest
Mar 10, 2021
From: MATTSON TECHNOLOGY, INC.
To: MATTSON TECHNOLOGY, INC.; BEIJING E-TOWN SEMICONDUCTOR TECHNOLOGY CO., LTD
Reel/Frame 055546/0437 →