Patent Assignment
Reel/Frame 055566/0655
Assignment of Assignor's Interest
Recorded: 2021-03-11
Pages: 3
Assignee
TOKYO ELECTRON LIMITED
3-1 AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Substrate Processing Device, Substrate Processing System, Control Method for Substrate Processing Device, and Control Method for Substrate Processing System