Patent Assignment
Reel/Frame 055629/0617
Assignment of Assignor's Interest
Recorded: 2021-03-17
Pages: 6
Assignors
IKUTA, HIROYUKI
Executed: 2021-03-09
UEDA, HIROKAZU
Executed: 2021-03-08
FUJINO, YUTAKA
Executed: 2021-03-10
Assignee
TOKYO ELECTRON LIMITED
3-1 AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Plasma Processing Method and Plasma Processing Apparatus