Patent Assignment
Reel/Frame 055637/0962
Assignment of Assignor's Interest
Recorded: 2021-03-18
Pages: 14
Assignors
LU, YEN-TIEN
Executed: 2021-03-05
SUN, XINGHUA
Executed: 2021-03-06
CHANG, SHIHSHENG
Executed: 2021-03-06
LIU, ERIC CHIH-FANG
Executed: 2021-03-04
RALEY, ANGELIQUE
Executed: 2021-03-04
LUTKER-LEE, KATIE
Executed: 2021-03-04
Assignee
TOKYO ELECTRON LIMITED
AKASAKA BIZ TOWER, 3-1 AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Method for Patterning a Dielectric Layer