Patent Assignment
Reel/Frame 055645/0581
Assignment of Assignor's Interest
Recorded: 2021-03-19
Pages: 3
Assignor
NISHIYAMA, KOJI
Executed: 2016-12-09
Assignee
SCREEN HOLDINGS CO., LTD.
TENJINKITA-MACHI 1-1, TERANOUCHI-AGARU 4-CHOME, HORIKAWA-DORI, KAMIGYO-KU, KYOTO-SHI, KYOTO, 602-8585, JAPAN
Covered Property
(1)
Substrate Cleaning Device, Substrate Processing Apparatus, Substrate Cleaning Method and Substrate Processing Method