Substrate cleaning device, substrate processing apparatus, substrate cleaning method and substrate processing method
A substrate cleaning device that includes a rotation holder and a cleaner. The rotation holder includes a rotator provided to be rotatable about a rotation axis, and a holder provided at the rotator to be capable of holding a substrate. The cleaner includes a cleaning tool provided to be capable of removing foreign matter on a back surface of the substrate by polishing, a mover that moves the cleaning tool while pressing the cleaning tool against the back surface of the substrate held by the holder, and a cleaning brush that further cleans the back surface of the substrate, which has been cleaned or is being cleaned by the cleaning tool.
1. A substrate cleaning device that cleans a back surface of a substrate, comprising:
a rotation holder that holds and rotates the substrate; and
a cleaner that cleans the back surface of the substrate held by the rotation holder, wherein
the rotation holder includes:
a rotator provided to be rotatable about a rotation axis, and
a holder provided at the rotator to be capable of holding the substrate,
wherein a rotation center of the substrate coincides with a rotation center of the rotator, and
the cleaner includes:
a cleaning tool provided to be capable of removing foreign matter on the back surface of the substrate by polishing,
a mover that moves the cleaning tool while pressing the cleaning tool against the back surface of the substrate held by the holder, and
a cleaning brush that further cleans the back surface of the substrate, which has been cleaned or is being cleaned by the cleaning tool.
2. The substrate cleaning device according to claim 1 , wherein the holder abuts against an outer peripheral end of the substrate and holds the substrate.
3. The substrate cleaning device according to claim 1 , wherein the cleaner further includes a cleaning liquid supplier that supplies a cleaning liquid to the back surface of the substrate, which has been cleaned or is being cleaned by the cleaning tool.
4. A substrate processing apparatus comprising:
a film former that forms a coating film on a surface to be processed of a substrate by supplying a coating liquid to the surface to be processed;
a remover that supplies a removal liquid for removing the coating film formed on a peripheral portion of the surface to be processed of the substrate by the film former to the peripheral portion of the substrate; and
the substrate cleaning device according to claim 1 that cleans a back surface of the substrate from which the coating film on the peripheral portion of the surface to be processed is removed by the remover.