Patent Assignment
Reel/Frame 055759/0144
Assignment of Assignor's Interest
Recorded: 2021-03-29
Pages: 4
Assignor
LIN, YUN-YUE
Executed: 2018-05-02
Assignee
TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
NO.8, LI-HSIN RD. 6, SCIENCE BASED INDUSTRIAL PARK, HSINCHU, 300, TAIWAN
Covered Property
(1)
Extreme Ultraviolet Mask and Method of Manufacturing the Same