Patent Assignment
Reel/Frame 055868/0596
Assignment of Assignor's Interest
Recorded: 2021-04-08
Pages: 4
Assignors
BROWN, BRIAN J.
Executed: 2021-03-31
MIKHAYLICHENKO, EKATERINA
Executed: 2021-04-07
JI, JIN
Executed: 2021-03-30
RANGARAJAN, JAGAN
Executed: 2021-03-30
ZUNIGA, STEVEN M.
Executed: 2021-03-30
Assignee
APPLIED MATERIALS, INC.
3050 BOWERS AVENUE, SANTA CLARA, CALIFORNIA, 95054
Covered Property
(1)
Substrate Handling in a Modular Polishing System with Single Substrate Cleaning Chambers