Patent Assignment
Reel/Frame 055879/0386
Assignment of Assignor's Interest
Recorded: 2021-04-09
Pages: 3
Assignors
KO, HUANG-SHAO
Executed: 2020-07-01
HSIEH, JUI-FU
Executed: 2020-07-01
LIAO, CHIH-TENG
Executed: 2020-07-01
CHENG, CHIH-CHING
Executed: 2020-07-01
Assignee
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
8, LI-HSIN RD. 6, HSINCHU SCIENCE PARK, HSINCHU, 300-78, TAIWAN
Covered Property
(1)
Plasma Control Method in Semiconductor Wafer Fabrication
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.