Patent Assignment
Reel/Frame 055907/0043
Assignment of Assignor's Interest
Recorded: 2021-04-13
Pages: 6
Assignors
LEE, JISUN
Executed: 2021-04-08
JEON, SEOKWOO
Executed: 2021-04-07
NAM, SANGHYUN
Executed: 2021-04-07
Assignees
SAMSUNG ELECTRONICS CO., LTD.
129, SAMSUNG-RO, YEONGTONG-GU, GYEONGGI-DO, SUWON-SI, 16677, KOREA, REPUBLIC OF
KOREA ADVANCED INSTITUTE OF SCIENCE AND TECHNOLOGY
291, DAEHAK-RO, YUSEONG-GU, DAEJEON, KOREA, REPUBLIC OF
Covered Property
(1)
Method of Fabrication and Control of Nano-Structure Array by Angle-Resolved Exposure in Proximity-Field Nano Patterning