Patent Assignment
Reel/Frame 055962/0477
Assignment of Assignor's Interest
Recorded: 2021-04-19
Pages: 8
Assignors
ROMANOVSKY, ANATOLY
Executed: 2021-04-10
XU, ZHIWEI
Executed: 2021-04-19
YUDITSKY, YURY
Executed: 2021-04-08
CUI, YIFENG
Executed: 2021-04-07
PARANJAPE, MANDAR
Executed: 2021-04-09
Assignee
KLA CORPORATION
ONE TECHNOLOGY DRIVE, MILPITAS, CALIFORNIA, 95035
Covered Property
(1)
Large-Particle Monitoring with Laser Power Control for Defect Inspection