Patent Assignment
Reel/Frame 056020/0397
Assignment of Assignor's Interest
Recorded: 2021-04-23
Pages: 6
Assignees
TOKYO ELECTRON LIMITED
3-1 AKASAKA 5-CHOME,, MINATO-KU,, TOKYO, 107-6325, JAPAN
DAIKIN INDUSTRIES, LTD.
UMEDA CENTER BUILDING,, 4-12, NAKAZAKI-NISHI 2-CHOME, KITA-KU,, OSAKA-SHI, OSAKA, 5308323, JAPAN
Covered Property
(1)
Film Forming Method and Film Forming Apparatus